DOORS（同志社大学図書館）

Mathad, G. S.

著者の属性	個人
一般注記	Symposium on Plasma Processing (3rd : 1981 : Denver, Colo.) Plasma processing, c1982 (a.e.) t.p. (G.S. Mathad, IBM Corp., East Fishkill, N.Y.)
コード類	典拠ID=AU00144787 NCID=DA03249537


1	Plasma processing XIV : proceedings of the international symposium / editor, G.S. Mathad ; assistant editors, M.D. Allendorf, R.E. Sah, M. Yang ; sponsoring divisions, Dielectric Science and Technology and Electronics Pennington, N.J. : Electrochemical Society , c2002